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Introduction to Microlithography
Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist materials, resist processing and plasm etching.
1 680,00 DH
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Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist materials, resist processing and plasm etching.
| ISBN / EAN | 9780841228481 |
|---|---|
| Editeur | American Chemical Society |