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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials.
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This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials.
| ISBN / EAN | 9783662569573 |
|---|---|
| Auteur | Zhang, Xiao-Sheng |
| Editeur | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |