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Nano- and Micro-Electromechanical Systems
Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.
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Introduces concepts, methods, techniques, and technologies that are needed to solve a wide variety of problems related to high-performance nano- and micro systems. This book builds the theoretical foundation for understanding, modeling, controlling, simulating, designing, and deploying nano- and microelectromechanical devices.
| ISBN / EAN | 9780849328381 |
|---|---|
| Auteur | Lyshevski, Sergey Edward (Rochester Institute of Technology, New York, USA) |
| Editeur | Taylor & Francis Inc |