Optical and EUV Lithography

Auteur: Erdmann, Andreas
Editeur: SPIE Press
Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.
Sur commande
Introduces interested students with backgrounds in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology, and other areas to the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers expand their knowledge of alternative methods and applications.
ISBN / EAN 9781510639010
Auteur Erdmann, Andreas
Editeur SPIE Press